General Optics
Micro Lens Arrays
Create highly compact collimation and focusing systems using our one- or two-dimensional microlens arrays (MLAs).
Coherent MLAs are typically configured with the individual lenslets arranged in a square or hexagonal periodic pattern, with a lens pitch of a few hundred micrometers. They can be fabrication using nanoimprinting, photolithography, and glass molding.
Micro Lens Array Capabilities
Coherent can produce MLAs with a wide variety of structures in various materials. High volume production of near infrared MLAs can be accomplished on 6 inch Si wafers.
Silicon Microlens Array Specifications
Material Specifications |
|
Material |
Silicon |
Reflective index |
≈ 3.42 |
Transparency |
R <0.2% T >99% @ 1260-1340 nm |
Fabrication Specifications |
|
Diameter |
600 ±5 μm |
Thickness |
400 ±10 μm |
Pitch |
750 ±1 μm |
Clear Aperture |
>510 nm |
Radius of curvature |
3.0 mm |
Conic |
0 |
Surface roughness |
<5 nm RMS |
Lens surface profile deviation |
<35 nm RMS |
Surface quality |
Scratch-dig: 5/1x0.025 base on ISO 10110-7 |
Chipping |
<100 μm |
Edge verticality |
90 ±2° |
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Optical Manufacturing Capabilities
Learn about the vertically integrated capabilities for material growth, fabrication, coating, and assembly, and rigorous QA at Coherent. Discover how these ensure the performance and reliability of our optics and minimize supply chain risks and uncertainties.
