Semiconductor Wafer Manufacturing

Build equipment that maximizes throughput and yield using cutting-edge optics, lasers, and composite materials.

  • Extreme Stability Construct lithography and wafer handling tools using thermally innovative materials.
  • Increase Yields Select from a range of lasers that enable virtually any inspection task.
  • Dependable EUV Lithography Ensure reliability and lifetime with the highest quality CO₂ laser optics and diamond windows.
FEOL Photolithography
FEOL Photolithography

Performance at any Node

From cutting-edge 3 nm chips to established 100 nm+ processes, build tools with Coherent lasers, optics, and advanced composite materials to ensure consistent, cost-effective, and reliable operation. Our innovative materials – including hybrid ceramics and silicon carbides – yield mechanical components that meet the extreme demands of EUV lithography, as do our laser optics and diamond windows. Plus, our full suite of lasers can power nearly any inspection task and perform diverse materials processing jobs such as marking and annealing.

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Semiconductor Wafer Manufacturing Products

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