Pulsed Laser Deposition (PLD)

Use PLD to rapidly create many different types of films with our uniquely powerful excimer lasers.

Stoichiometric Films Rely on our stable excimer lasers to get stoichiometric layers with total thickness control.
Faster Deposition Produce large area films faster with the high pulse energy of our excimer lasers.
Three-Shift PLD Run your production 24/7 thanks to the proven uptime and reliability of our lasers.

Versatile Deposition

An ever-increasing range of technologies and industries rely on thin films, including OLED displays, MEMS, semiconductors, photovoltaics, medical sensors, mobile phones, and advanced batteries. PLD is often the production method of choice because it works well with materials as diverse as diamond-like carbon (DLC), perovskites, piezoelectrics, and high-temperature superconductors (HTS). In all these cases, our excimer lasers enable PLD with high-speed, precise depth control, and high-fidelity stoichiometry.

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Product Applications

Superconducting Wire/Tape

Use the high power of LEAP lasers for lower-cost, high-volume production of HTS wire and tape.

SuperHard DLC Films

Create superhard DLC films at low temperatures with low residual stress using LEAP lasers.

Advanced Solar

Develop perovskite-based devices systems and other next-generation photovoltaics using COMPex lasers.

RADIO FREQUENCY PIEZO FILTERS

Excimer laser PLD enables piezoelectric scandium-doped aluminum nitride (Sc: AlN) thin films for RF filters, delivering the piezo-response and high-frequency RF properties needed for 5G and beyond.

Thin Film Wafers

Excimer laser PLD can produce more complex and crystalline thin films over larger (up to 300 mm) wafers for use in MEMS, semiconductors, photovoltaics, and OLED displays.

Solid-State Thin-Film Batteries

PLD delivers advanced solid electrolytes, including anode and cathode materials, with adjustable density and stoichiometry as well as nanometer range thickness precision.

Featured Blog

PLD: from Lab Research to Full Production

See how excimer laser deposition creates high-quality films.

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Solmates: Excimer Lasers Advance Pulsed Laser Deposition

INTRODUCING THE COMPEX F2: THE MOST POWERFUL VUV LASER AVAILABLE

COMPex

COMPex UV lasers deliver hundreds of millijoules of pulse energy with high pulse-to-pulse stability and excellent beam uniformity for demanding applications.

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LEAP

LEAP UV excimer lasers offer high energy, high precision processing with our combination of high duty-cycle output, reliability, and low cost of ownership.

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LAMBDA SX

LAMBDA SX are industrial UV excimer lasers for the production floor, with stable high energy pulses supporting large-area UV processing with beam stability.

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Success Story

UNIVERSITY OF AUGSBURG

“This 248 nm excimer laser is a proven match for PLD of many different oxides and provides the beam homogeneity and high pulse-to-pulse stability we need for meaningful quantitative studies."

— Helmut Karl, Professor, Department of Physics, University of Augsburg, Germany

High-Power Excimer Lasers for Thin Film Equipment at Solmates, Enschede

Using high-power, LEAP series excimer lasers, Arjen Janssens and colleagues at company Solmates, Enschede, The Netherlands develop innovative pulsed laser deposition equipment which will play a key role in the development of future chip designs and the integration of new thin-film materials. Learn more about laser technology in thin-film industries.