The LAMBDA SX industrial excimer laser series provides unique high UV power to the production floor. It is designed to deliver the best energy stability available, and also features a number of innovative technologies for unsurpassed performance and reliability. It is available from 300 Watts (248 nm and 308 nm) to 500/540 Watts (308 nm only).
The LAMBDA SX lasers are perfectly suited for Excimer Laser Annealing (ELA), industrial scale Pulsed Laser Deposition (PLD), Laser Lift-Off (LLO), micro structuring, and all other applications which require high UV laser throughput.
The proprietary PowerLok technology suppresses overshoots in a repeated burst train. It employs a self-learning algorithm, utilizing a look-up table to smoothen cycling bursts. PowerLok is available on 300 Watts class models only.
The proprietary TimeLok technology stabilizes the trigger-to-pulse delay of all-solid- state HV switch-driven excimer lasers and minimizes the time jitter. It also employs a self-learning algorithm, utilizing a look-up table for delay stabilization in any operation mode.
Laser parameters like HV, energy and sigma are recorded in data files. These files can easily be analyzed by the optional ExiScope software in order to track and improve laser performance. ExiScope serves as a virtual scope for evaluation of complex information available from the laser data files. Furthermore the lasers can optionally be equipped with pulse shape analysis modules consisting of fast photo diode and digitizer module.
Optional Remote Beam Adjustment
LAMBDA SX lasers can optionally be equipped with motorized optics mounts which allow remote adjustment of the laser resonator by hand-held terminal.