The trend towards mobile communications, smart phones, personal computing and digital photo and video drive the market for advanced small and medium size displays with the highest resolution, high brightness and long battery life for a perfect user experience. For these displays the LTPS (Low Temperature Poly Silicon) TFT backplane is inevitable to enable stable performance of AMLCD and AMOLED displays.

Coherent is the market leader for excimer lasers and UV optical systems that are the enabling components of the annealing system. Highest laser power of more than 1 kW and optimized line beams of up to 750 mm are used worldwide for the manufacturing of LTPS based LCD and OLED displays.
 

• Annealing of Silicon Backplanes with 540W Excimer Lasers
• Silicon Annealing by Sequential Lateral Solidification (SLS)